Vacuum Instrumentation and Control
from a User's Perspective

MKS offers several educational programs. A range of topics, listed below, is available both as live training events and via web-based training. Custom training options can also be arranged.

Download "Vacuum Training for Manufacturing: Why and How"
from Vacuum & Coating Technology (815k)

Sharpen your knowledge of vacuum technology and instrumentation with intensive, training from MKS Instruments. We offer a convenient, on-site educational program and web-based training.

MKS training programs use modules of detailed, technical information and demonstration equipment along with full color illustrations. Each course is carefully designed to approach topics from a user's perspective, so that the information is both interesting and relevant to your job. Upon completion of a course, a certificate of achievement is awarded. "Vacuum Instrumentation and Control" is divided into three sections, covering vacuum as applied in semiconductor process applications and the control instruments that are associated with monitoring and controlling vacuum processes:

1. Creation and Control of the Vacuum Process Environment

2. Vacuum Gauging Techniques

3. Thermal Mass Flow Controllers

The Audience:

Equipment engineers, process engineers, and technicians who want a better knowledge of vacuum technique and related measurement and control systems should take these courses. Also, those who are involved in the development, maintenance, calibration, sales or support of vacuum instrumentation will benefit from this training.

Prerequisite: Participants should have some familiarity with vacuum instrumentation or the operation and maintenance of process tools.

Course Descriptions:

Creation and Control of the Vacuum Process Environment

This is a comprehensive introduction to vacuum fundamentals and practice in the context of moderate to high gas throughput process systems. The concepts of vacuum and related measurement and control systems are taught so that the topics are relevant to the individual who performs setup and maintenance of process tools. The participant will gain an understanding of:
The relationships between the various degrees of vacuum and process requirements

The issues and solutions involved in the creation and containment of these levels of vacuum and the related process environment

Closed-loop pressure and flow control systems and their embodiment in process tools

Process chemical delivery devices including thermal, pressure-based and direct liquid injection

I.  Fundamentals
Properties and attributes of the vacuum environment, vacuum ranges and units of measure, historical background, the behaviors and characteristics of gases at low pressures
II.  System Discussion 1:
Medium Vacuum System - Mechanical pumps, time constant, problems and solutions, system pressure profile, and simple system diagnostics
III.  System Discussion 2: High Vacuum System - High vacuum pumps, joining methods, issues and practices for high vacuum, throughput, and base pressure
IV.  System Discussion 3:
Introducing Pressure and Flow Control Elements - Closed-loop control systems, direct and indirect gauging, proportioning and throttle valves, and mass flow controllers
V.  System Discussion 4:
PVD Cluster Tool - System configuration, contamination control, atmosphere referenced gauges, pressure control, backside cooling, thermal mass flow controllers
VI.  System Discussion 5:
LPCVD System - Handling condensable reaction by-products, heated components, and other mass flow techniques

Vacuum Gauging Techniques

This is a detailed, practical understanding of vacuum gauge types, their operating principles, ranges of operation, sensitivities and limitations, and precautions in use. The material covers indirect gauges such as thermocouple, Pirani, convection Pirani and ionization, capacitance manometers and residual gas analyzers. The participant will gain an understanding of:
The operating principles and characteristics of indirect and direct total pressure gauges and partial pressure analyzers

The appropriate use of gauges as indicators, measurement devices, elements in control systems, and as calibration instruments

I. Indirect Total Pressure Gauges:
Thermocouple, Pirani, convection Pirani, hot and cold cathode ion gauges, and spinning rotor gauge
II. Direct Total Pressure:
Capacitance Manometer Development, differential and absolute manometers, ranges and outputs, accuracy _ definitions and factors, mechanical configurations, gauge isolation, and calibration using transfer standards
III. Indirect Partial Pressure:
Residual Gas Analyzers Partial pressure, uses of the RGA, principle of mass separation, factors associated with the RGA spectrum, components of the quadrupole RGA, and sampling configurations

Thermal Mass Flow Controllers

This is a working knowledge of these often misunderstood devices. Topics include descriptions of the various sensor and control valve configurations and characteristics, materials and construction considerations, characteristics and sensitivities of thermal MFCs, calibration procedures, in situ verification techniques, and practical troubleshooting techniques and guidelines. The participant will gain an understanding of:
Construction and characteristics associated with the various sensor and valve technologies Effects of external parameters

Effects of physical design and materials selection on performance and process compatibility Performance terminology and measurement

Calibration and in situ verification techniques including the use of primary and transfer standards

I.  Mass Flow Defined
II.  Use and Importance of Mass Flow Measurement and Control in Process Systems
III.  Thermal MFC Technology Sensors, control valves, materials, and typical constructions
IV.  Characteristics and Sensitivities of the Thermal MFC
V.  Calibration Primary standards, transfer standards, in-situ calibration and verification
VI.  Troubleshooting Techniques