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Contact MKS Service & Support

MKS Instruments Repair and Calibration

MKS repair & calibration
for pressure instruments
and analog & digital MFC's.
Servicing advanced materials subsystems and providing complete RGA service
and support.

Contact MKS Service.

Locate the MKS Service Center nearest you.

How to order repair and calibration services.

Calibration services from MKS.


MKS only uses new components and subassemblies.
We do not reuse parts.

Download the Health & Safety Form
This form must be completed and included with equipment being sent to us for calibration or repair.

Download "Calibration Services", from MKS Instruments.

Learn more about MKS Comprehensive Customer Care Programs.

Need more help?

Contact an MKS Service Specialist by sending an email to MKS or call:

800-227-8766
978-284-4000 (outside the USA),
877-464-2789 (24/7 technical assistance in the USA).

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