Remote Plasma Systems
Ozone Products
RF Power Generators
DC Power Generators
Impedance Matching Networks
Plasma Metrology
Accessories for Power Sources
Service/Training for ENI® Products
Flanges and Fittings
Vacuum Valves
Vacuum Gauges & Transducers
In-Stock! - Vacuum Gauges Available for Immediate Delivery
Heated Lines and Process Solutions
Custom Vacuum Fabrication
Mass Flow Controllers
Integrated Solutions
Advanced Material Delivery
Flow Measurement/Control Power Supplies, Readouts & Accessories
Baratron® Capacitance Manometers and Pressure Transducers
Industrial Transducers
Pressure Transducers
Pressure Switches
Pressure Control Subsystems
Power Supplies, Readouts & Accessories for Pressure Control Products
FTIR & NDIR
Mass Spectrometry
Control Systems
TOOLweb® Data Acquisition, Sensor Integration and Data Analysis
Yield Management, APC
PICO® Helium Leak Detectors
Pressure Rate Calibrators
Flow Rate Calibrators
Integrated Subsystems
Ionization for High Technology
Process Environment Monitoring (Novx)
Static Control for Converting, Printing, & Plastics
RF Amplifiers for MRI
Stainless Steel Fittings
Filter Housings
Filter Housing Heaters
Pressure Measurement and Calibration Instruments
Ozone Generators
Flow Control
Process Monitoring Software
Custom Biopharmaceutical Products
Power & Reactive Gas
Vacuum Technology
Flow Measurement & Control
Pressure Measurement & Control
Gas Analysis
Control Information & Technology
Leak Detection
Calibration
Integrated Subsystems
Ionization & Industrial Static Control
Medical Electronics
Biopharmaceutical
Product Catalog
Power & Reactive Gas
Remote Plasma Systems
On-Wafer Processing
R*evolution® - AX7690 Integrated Remote Plasma Source for On-Wafer Processing
AX2600 Integrated Plasma System
SmartPower® AX2500 Series Microwave Power Generator
ASTeX AX3060 SmartMatch® Microwave Matching Unit
ASTeX AX7610 Chemical Downstream Plasma Source
Chamber Cleaning
ASTRONi Type AX7670 Remote Plasma Source (rated to 3.0 slm flow rate)
ASTRONe - AX7680 Remote Plasma Source (rated to 4.0 SLM flow rate)
ASTRONex - AX7685 Remote Plasma Source (rated to 6.0 slm flow)
ASTRONhf-s AX7645 Remote Plasma Source (rated to 15.0 slm flow)
R*evolution® - AX7690 Integrated Remote Plasma Source for On-Wafer Processing
Ozone Products
O3MEGA® AX8561 Integrated Ozone Delivery System
SEMOZON® AX8500 Series Standalone Ozone Delivery Systems
SEMOZON® AX8400 Series Ozone Generators
SEMOZON® Model 090.2 Ozone Generator
LIQUOZON® Ozonated Water Delivery Subsystems and Accessories
Ozone Gas Destruct (OVS)
Static Mixer
RF Power Generators
Mid-Frequency RF Generators (1 - 4MHz)
NOVA® Series 2 MHz 2,500W and 5,000W RF Plasma Generators
Spectrum® 2MHz, 5kW and 11kW RF Generators
High-Frequency RF Generators (13.56MHz)
ACG Series 13.56 MHz 300 to 1,000 Watt Air-Cooled RF Plasma Generators
GHW Series 13.56 MHz 1250, 2500 and 5000 Watt High-Reliability RF Plasma Generators
Spectrum® 3013 3000W RF Plasma Generator
SurePower® 13.56 MHz RF Generators from 3.5kW to 13kW and Higher
Extended-Frequency (VHF) RF Generators (27.12 - 40.68 MHz)
GEW2527 27.12 MHz, 2500W RF Plasma Generator
GEW3040 40.68 MHz, 3000W RF Plasma Generator
DC Power Generators
Optima® OPT-50, 5kW DC Plasma Generator
Optima® OPT-100, 10 kW DC Plasma Generator
Optima® OPT-200, 20kW DC Plasma Generator
Optima® OPT-400, 40kW DC Plasma Generator
Optima® OPT-600, 60kW DC Plasma Generator
RPG-50 DC 5kW Plasma Generator
RPG-100 10kW DC Plasma Generator
RPG-200 20kW Pulsed DC Plasma Generator
Impedance Matching Networks
Controllers for Remote Matching Networks
ENI Remote Front Panel Controllers
MWH-5 500W, 13.56MHz Impedance Matching Network
Matchwork® 10D 1000 W, 13.56MHz Digital Impedance Matching Network
2,500 W, 13.56 MHz Impedance Matching Network
MWH-100 10,000 W, 13.56 MHz Impedance Matching Network
MWH-25 2500 W, 27.12 MHz Impedance Matching Network
Plasma Metrology
V/I Probe RF Impedance Analyzer
Accessories for Power Sources
ENI DC Relays
ENI HF-3000 Band Pass Filter
Service/Training for ENI® Products
Service for ENI Products
ENI Training Programs
Vacuum Technology
Flanges and Fittings
Series 31 ISO-KF Vacuum Fittings
Series 31 ISO-KF Blank Flanges
Series 31 ISO-KF Weld Flanges
Series 31 ISO-KF Seals
Series 31 ISO-KF to KF Reducers
Series 31 ISO-KF Adapters
Series 31 ISO-KF Clamps
Series 31 ISO-KF Crosses and Tees
Series 31 ISO-KF Elbows and Straight Sections
Series 31 ISO-KF Bellows and Flexible Hose
Series 31 Flangeless Tubing
Series 31 ISO-KF Viewports, Feedthroughs, and Bourdon Gauges
Series 76 ISO-Universal Components
Series 76 ISO-Universal Blank Flanges
Series 76 ISO-Universal Weld Flanges
Series 76 ISO-Universal Seals
Series 76 ISO-Universal Clamps, Bolts and Retaining Rings
Series 76 ISO-Universal Reducers
Series 76 ISO-Universal Adapters
Series 76 ISO-Universal Elbows and Straight Sections
Series 76 ISO-Universal Tees and Crosses
Series 76 ISO-Universal Tubing
Series 76 ISO-Universal Flexible Hose and Bellows
Series 76 Accessories
Series 88 CF Components
Series 88 CF Double-sided Flanges
Series 88 CF Single-Sided Flanges
Series 88 Mini 1 1/3 inch CF Weld Stubs
Series 88 CF Half Nipples
Series 88 CF Full Nipples
Series 88 CF Zero Length Reducers
Series 88 CF to ISO/Ball/Tube Adapters
Series 88 VCR Adapters
Series 88 CF Viewports
Series 88 45 and 90 degree CF Elbows
Series 88 CF Tees
Series 88 CF Crosses
Series 88 CF Flexible Hose and Bellows
Series 88 CF Hardware
Series 23 ButtWeld Components
Series 23 Buttweld 45-Degree Elbows
Series 23 Buttweld 45-Degree Elbows with Tangents
Series 23 Buttweld 90-Degree Elbows
Series 23 Buttweld 90-Degree Elbows with Tangents
Series 23 ButtWeld Ball Sockets
Series 23 Buttweld Braided Metal Hose
Series 23 Buttweld Crosses
Series 23 Buttweld Endcaps
Series 23 Buttweld Reducers
Series 23 Buttweld Reducing Tees
Series 23 Buttweld Tees
Series 23 Buttweld Tubing
Vacuum Valves
Single Stage Isolation Valves
Series 150/160 Single Stage Isolation Valves
Series 150 Angle Valves with CF Flanges
Series 150 Angle Valves with ISO Flanges
Series 150 Angle Valves with Weld Stub Flanges
