Gas Correction Factors for Thermal-based Mass Flow Controllers

The following table lists theoretical gas correction factors for various gases with respect to Nitrogen for thermal-based mass flow controllers. Please note that a non-linearity may exist between a Nitrogen calibration and the actual flow of process gases.

Gas Symbol Specific Heat, CP
cal/g°C Density
g/l @ 0°C Conversion
Factor

Air - - - 0.240 1.293 1.00

Ammonia NH₃ 0.492 0.760 0.73

Argon Ar 0.1244 1.782 1.39

Arsine AsH₃ 0.1167 3.478 0.67

Boron Trichloride BCl₃ 0.1279 5.227 0.41

Bromine Br₂ 0.0539 7.130 0.81

Carbon Dioxide CO₂ 0.2016 1.964 0.70*

Carbon Monoxide CO 0.2488 1.250 1.00

Carbon Tetrachloride CCl₄ 0.1655 6.86 0.31

Carbon Tetraflouride
   (Freon - 14) CF₄ 0.1654 3.926 0.42

Chlorine Cl₂ 0.1144 3.163 0.86

Chlorodifluoromethane
   (Freon - 22) CHClF₂ 0.1544 3.858 0.46

Chloropentafluoroethane
   (Freon - 115) C₂ClF₅ 0.164 6.892 0.24

Chlorotrifluoromethane
   (Freon - 13) CClF₃ 0.153 4.660 0.38

Cyanogen C₂N₂ 0.2613 2.322 0.61

Deuterium D₂ 1.722 0.1799 1.00

Diborane B₂H₆ 0.508 1.235 0.44

Dibromodifluoromethane CBr₂F₂ 0.15 9.362 0.19

Dichlorodifluoromethane
   (Freon - 12) CCl₂F₂ 0.1432 5.395 0.35

Dichlorofluoromethane
   (Freon - 21) CHCl₂F 0.140 4.592 0.42

Dichloromethysilane (CH₃)₂SiCl₂ 0.1882 5.758 0.25

Dichlorosilane SiH₂Cl₂ 0.150 4.506 0.40

1,2-Dichlorotetrafluoroethane
   (Freon - 114) C₂Cl₂F₄ 0.160 7.626 0.22

1,1-Difluoroethylene
   (Freon - 1132A) C₂H₂F₂ 0.224 2.857 0.43

2,2-Dimethylpropane C₅H₁₂ 0.3914 3.219 0.22

Ethane C₂H₆ 0.4097 1.342 0.50

Fluorine F₂ 0.1873 1.695 0.98

Fluoroform
   (Freon - 23) CHF₃ 0.176 3.127 0.50

Freon - 11 CCl₃F 0.1357 6.129 0.33

Freon - 12 CCl₂F₂ 0.1432 5.395 0.35

Freon - 13 CClF₃ 0.153 4.660 0.38

Freon - 13 B1 CBrF₃ 0.1113 6.644 0.37

Freon - 14 CF₄ 0.1654 3.926 0.42

Freon - 21 CHCl₂F 0.140 4.592 0.42

Freon - 22 CHClF₂ 0.1544 3.858 0.46

Freon - 23 CHF₃ 0.176 3.127 0.50

Freon - 113 C₂Cl₂F₃ 0.161 8.360 0.20

Freon - 114 C₂Cl₂F₄ 0.160 7.626 0.22

Freon - 115 C₂ClF₅ 0.164 6.892 0.24

Freon - 116 C₂F₆ 0.1843 6.157 0.24

Freon - C318 C₄F₈ 0.1866 8.93 0.164

Freon - 1132A C₂H₂F₂ 0.224 2.857 0.43

Helium He 1.241 0.1786 1.45

Hexafluoroethane
   (Freon - 116) C₂F₆ 0.1843 6.157 0.24

Hydrogen H₂ 3.419 0.0899 1.01

Hydrogen Bromide HBr 0.0861 3.610 1.00

Hydrogen Chloride HCl 0.1912 1.627 1.00

Hydrogen Fluoride HF 0.3479 0.893 1.00

Isobutylene C₄H₈ 0.3701 2.503 0.29

Krypton Kr 0.0593 3.739 1.543

Methane CH₄ 0.5328 0.715 0.72

Methyl Fluoride CH₃F 0.3221 1.518 0.56

Molybdenum Hexafluoride MoF₆ 0.1373 9.366 0.21

Neon Ne 0.246 0.900 1.46

Nitric Oxide NO 0.2328 1.339 0.99

Nitrogen N₂ 0.2485 1.250 1.00

Nitrogen Dioxide NO₂ 0.1933 2.052 **

Nitrogen Trifluoride NF₃ 0.1797 3.168 0.48

Nitrous Oxide N₂O 0.2088 1.964 0.71

Octafluorocyclobutane
   (Freon - C318) C₄F₈ 0.1866 8.93 0.164

Oxygen O₂ 0.2193 1.427 0.993

Pentane C₅H₁₂ 0.398 3.219 0.21

Perfluoropropane C₃F₈ 0.194 8.388 0.17

Phosgene COCl₂ 0.1394 4.418 0.44

Phosphine PH₃ 0.2374 1.517 0.76

Propane C₃H₈ 0.3885 1.967 0.36

Propylene C₃H₆ 0.3541 1.877 0.41

Silane SiH₄ 0.3189 1.433 0.60

Silicon Tetrachloride SiCl₄ 0.1270 7.580 0.28

Silicon Tetrafluoride SiF₄ 0.1691 4.643 0.35

Sulfur Dioxide SO₂ 0.1488 2.858 0.69

Sulfur Hexafluoride SF₆ 0.1592 6.516 0.26

Trichlorofluoromethane
   (Freon - 11) CCl₃F 0.1357 6.129 0.33

Trichlorosilane SiHCl₃ 0.1380 6.043 0.33

1,1,2-Trichloro -
1,2,2-Trifluoroethane
   (Freon - 113) CCl₂FCClF₂
or  C₂Cl₃F₃ 0.161 8.360 0.20

Tungsten Hexafluoride WF₆ 0.0810 13.28 0.25

Xenon Xe 0.0378 5.858 1.32

** Consult MKS Instruments
Note: Standard pressure is defined as 760 mmHg (14.7 psia). Standard temperature is defined as 0°C.

Find gas correction factors for ionization vacuum gauges here.

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Gas	Symbol	Specific Heat, CP cal/g°C	Density g/l @ 0°C	Conversion Factor
Air	- - -	0.240	1.293	1.00
Ammonia	NH₃	0.492	0.760	0.73
Argon	Ar	0.1244	1.782	1.39
Arsine	AsH₃	0.1167	3.478	0.67
Boron Trichloride	BCl₃	0.1279	5.227	0.41
Bromine	Br₂	0.0539	7.130	0.81
Carbon Dioxide	CO₂	0.2016	1.964	0.70*
Carbon Monoxide	CO	0.2488	1.250	1.00
Carbon Tetrachloride	CCl₄	0.1655	6.86	0.31
Carbon Tetraflouride (Freon - 14)	CF₄	0.1654	3.926	0.42
Chlorine	Cl₂	0.1144	3.163	0.86
Chlorodifluoromethane (Freon - 22)	CHClF₂	0.1544	3.858	0.46
Chloropentafluoroethane (Freon - 115)	C₂ClF₅	0.164	6.892	0.24
Chlorotrifluoromethane (Freon - 13)	CClF₃	0.153	4.660	0.38
Cyanogen	C₂N₂	0.2613	2.322	0.61
Deuterium	D₂	1.722	0.1799	1.00
Diborane	B₂H₆	0.508	1.235	0.44
Dibromodifluoromethane	CBr₂F₂	0.15	9.362	0.19
Dichlorodifluoromethane (Freon - 12)	CCl₂F₂	0.1432	5.395	0.35
Dichlorofluoromethane (Freon - 21)	CHCl₂F	0.140	4.592	0.42
Dichloromethysilane	(CH₃)₂SiCl₂	0.1882	5.758	0.25
Dichlorosilane	SiH₂Cl₂	0.150	4.506	0.40
1,2-Dichlorotetrafluoroethane (Freon - 114)	C₂Cl₂F₄	0.160	7.626	0.22
1,1-Difluoroethylene (Freon - 1132A)	C₂H₂F₂	0.224	2.857	0.43
2,2-Dimethylpropane	C₅H₁₂	0.3914	3.219	0.22
Ethane	C₂H₆	0.4097	1.342	0.50
Fluorine	F₂	0.1873	1.695	0.98
Fluoroform (Freon - 23)	CHF₃	0.176	3.127	0.50
Freon - 11	CCl₃F	0.1357	6.129	0.33
Freon - 12	CCl₂F₂	0.1432	5.395	0.35
Freon - 13	CClF₃	0.153	4.660	0.38
Freon - 13 B1	CBrF₃	0.1113	6.644	0.37
Freon - 14	CF₄	0.1654	3.926	0.42
Freon - 21	CHCl₂F	0.140	4.592	0.42
Freon - 22	CHClF₂	0.1544	3.858	0.46
Freon - 23	CHF₃	0.176	3.127	0.50
Freon - 113	C₂Cl₂F₃	0.161	8.360	0.20
Freon - 114	C₂Cl₂F₄	0.160	7.626	0.22
Freon - 115	C₂ClF₅	0.164	6.892	0.24
Freon - 116	C₂F₆	0.1843	6.157	0.24
Freon - C318	C₄F₈	0.1866	8.93	0.164
Freon - 1132A	C₂H₂F₂	0.224	2.857	0.43
Helium	He	1.241	0.1786	1.45
Hexafluoroethane (Freon - 116)	C₂F₆	0.1843	6.157	0.24
Hydrogen	H₂	3.419	0.0899	1.01
Hydrogen Bromide	HBr	0.0861	3.610	1.00
Hydrogen Chloride	HCl	0.1912	1.627	1.00
Hydrogen Fluoride	HF	0.3479	0.893	1.00
Isobutylene	C₄H₈	0.3701	2.503	0.29
Krypton	Kr	0.0593	3.739	1.543
Methane	CH₄	0.5328	0.715	0.72
Methyl Fluoride	CH₃F	0.3221	1.518	0.56
Molybdenum Hexafluoride	MoF₆	0.1373	9.366	0.21
Neon	Ne	0.246	0.900	1.46
Nitric Oxide	NO	0.2328	1.339	0.99
Nitrogen	N₂	0.2485	1.250	1.00
Nitrogen Dioxide	NO₂	0.1933	2.052	**
Nitrogen Trifluoride	NF₃	0.1797	3.168	0.48
Nitrous Oxide	N₂O	0.2088	1.964	0.71
Octafluorocyclobutane (Freon - C318)	C₄F₈	0.1866	8.93	0.164
Oxygen	O₂	0.2193	1.427	0.993
Pentane	C₅H₁₂	0.398	3.219	0.21
Perfluoropropane	C₃F₈	0.194	8.388	0.17
Phosgene	COCl₂	0.1394	4.418	0.44
Phosphine	PH₃	0.2374	1.517	0.76
Propane	C₃H₈	0.3885	1.967	0.36
Propylene	C₃H₆	0.3541	1.877	0.41
Silane	SiH₄	0.3189	1.433	0.60
Silicon Tetrachloride	SiCl₄	0.1270	7.580	0.28
Silicon Tetrafluoride	SiF₄	0.1691	4.643	0.35
Sulfur Dioxide	SO₂	0.1488	2.858	0.69
Sulfur Hexafluoride	SF₆	0.1592	6.516	0.26
Trichlorofluoromethane (Freon - 11)	CCl₃F	0.1357	6.129	0.33
Trichlorosilane	SiHCl₃	0.1380	6.043	0.33
1,1,2-Trichloro - 1,2,2-Trifluoroethane (Freon - 113)	CCl₂FCClF₂ or C₂Cl₃F₃	0.161	8.360	0.20
Tungsten Hexafluoride	WF₆	0.0810	13.28	0.25
Xenon	Xe	0.0378	5.858	1.32
Consult MKS Instruments Note:** Standard pressure is defined as 760 mmHg (14.7 psia). Standard temperature is defined as 0°C.